Travel Range : 100 ~ 600 mm
Repeatability : ±0.5 μm
Accuracy : ±1 ~ ±2 μm
Load Capacity : 40 kg
Max. Velocity : 2 m/s

Travel Range : 100 ~ 300 mm
Repeatability : ±0.25 μm
Accuracy : ±0.5 μm
Load Capacity : 45 kg
Max. Velocity : 1 m/s

Travel Range : ±60 mm
Repeatability : ±0.1 μm
Accuracy : ±0.275 μm (Plus)
Load Capacity : 14 kg
Max. Velocity : 0.2 m/s

Travel Range : 25 mm
Repeatability : ±0.5 μm
Accuracy : ±1 μm
Load Capacity : 50 kg
Max. Velocity : 50 mm/s

Repeatability : ±2 arcsec
Accuracy : ±3 arcsec
Axial Runout : ±3 µm
Radial Runout : ±3.5 µm
Load Capacity : 7 kg

Repeatability : ±1 arcsec
Accuracy : ±1.5 arcsec
Axial Runout : <100 nm
Radial Runout : <200 nm
Load Capacity : 53 kg

Travel Range : 25mm in Z
Repeatability : ±0.3 μm in Z
Accuracy : ±0.6 μm in Z
Load Capacity : 2 kg
Position Stability : ±15 nm

Travel Range : 155 x 25mm in XZ
Repeatability : ±0.5 μm in X
Repeatability : ±0.2 μm in Z
Accuracy : ±0.4 μm in Z
Load Capacity : 2 kg

Travel Range : ±5mm & ±0.2° in ZTipTilt
Repeatability : ±0.03 μm in Z
Accuracy : ±0.02 μm in Z
Load Capacity : 2 kg
Position Stability : ±15 nm

Travel Range : 456 x 355mm in XY
Repeatability : ±0.35 μm in XY
Repeatability : ±0.02 μm in Z
Accuracy : ±0.8 μm in XY / ±0.01 μm in Z
Load Capacity : 2 kg

Turnkey Concepts
High Precision Measurement Technology
Electrostatic & Vacuum Chuck
Dust-free Cable System
Active Vibration Isolation System (Piezo)