Min. Step Size : 50 ~ 100 μm (Pulsed Operation) 
Smooth Power Delivery : 1N, 3N, 5N or 10N
Max. Speed : 1000 mm/s 
Ultra Durable : Lifetime > 1000 km 
Integrated Controller

Travel Range : 10 ~ 110 mm 
Min. Incremental Motion : 25 nm
Repeatability : ± 50 nm 
Drive Force : Up to 5 N 
HV / UHV / Non Magnetic Options

Travel Range : 10 mm
Resolution : Down to 1 nm
Load Capacity : 2.5 kg
Drive Force : 15 N 
HV / UHV / Non Magnetic Options

Various Communication Protocol
Libraries for LabVIEW, Matlab, C++...
Digital & Analog IOs
Drive signal: 45 V (0 ~ 200 kHz) 
Operating temperature: 0 to 40 °C

Travel Range : 20 / 35 / 50 mm 
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm 
Drive Force : Up to 10 N 
HV (10⁻⁶ mbar) Option

Travel Range : 10 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm
Drive Force : Up to 10 N 
HV (10⁻⁶ mbar) Option

Travel Range in XY :
Travel Range in Θ(R) : ±10 °
Min. Incremental Motion : 2 nm
Load Capacity : 10 N 
HV (10⁻⁶ mbar) Option

3 Axes (6 with Two Daisy-Chained)
USB C & RS485 Communication Interfaces
Libraries for LabVIEW, C++
Digital IO For Trigger Function
Operating Temperature: 0 ~ 50 °C

Custom Motion System Designs 
Special Environment (UHV)
Applying Mass Compensation 
Support All Common Communication Protocols
Integrated Controllers Possible