PIEZO WALKING DRIVE

Piezo Walking Drive Technology는 마이크로를 넘어 나노미터 이하까지 위치제어가 가능합니다. 스텝사이즈를 나노미터로 제어할 수 있기 때문에 부드러운 동작 수행이 가능하며 백래쉬가 없고 자기장에 영향을 받지 않기 때문에 다양한 어플리케이션에 적용되고 있습니다.

GO Stages

Displacement : 20 / 35 / 50 mm

Min. Incremental Motion : 2 nm

Repeatability : ± 100 nm

Drive Force : Up to 5 N

Incremental & Absolute Encoder

Self-Locking at Rest

Max. Velocity : 8 mm/s

GO Actuator & Mirror Mount

Displacement : 9 mm (13 °)

Resolution : 2 nm (0.05 µrad)

Repeatability : ± 200 nm (± 0.05 µrad)

Optical Incremental Encoder

Self-Locking at Rest

Max. Velocity : 8 mm/s (7 °/s)

GO Elevation Stage

Displacement : 10 mm

Min. Incremental Motion : 2 nm

Repeatability : ± 100 nm

Drive Force : Up to 10 N

Incremental & Absolute Encoder

Self-Locking at Rest

Max. Velocity : 8 mm/s

GO TipTiltStage

Displacement in Z : ±10 mm

Displacement in Θ(XY) : ±3 °

Min. Incremental Motion : 2 nm

Load Capacity : 10 N

Self-Locking at Rest

Base & Top Diameter : 150 mm

GO XYRStage

Displacement in XY : ±10 mm

Displacement in Θ(R) : ±10 °

Min. Incremental Motion : 2 nm

Load Capacity : 10 N

Self-Locking at Rest

Base Diameter : 165 mm

GO HexStage 2

Displacement in XYZ : ±5 mm

Displacement in Θ(XYZ) : ±10 °

Min. Incremental Motion : 2 nm

Load Capacity : 10 N

Self-Locking at Rest

Base Diameter : 138 mm