라이모션은 고진공 환경에서의 모션제어를 위해 Phytron 사의 고진공 모터를 적용, Out-gassing 문제를 최소화된 다양한 정밀스테이지 및 시스템을 공급하고 있습니다. 또한 고객의 다양한 요구에 맞는 커스텀 진공 솔루션을 제공하고 있습니다.

VACUUM SOLUTIONS

Vacuum Linear Stage Basic

Displacement : 50 ~ 250 mm

Step Size : 500 nm

Repeatability : < 1 μm

Load Capacity : 150 N

Max. Velocity : 3 mm/s
FV and HV Environment

Vacuum Linear Stage Plus

Displacement : 50 ~ 250 mm

Step Size : 50 nm

Repeatability : ± 0.05 μm

Load Capacity : 150 N / 300 N

Max. Velocity : 3 mm/s
FV, HV, UHV, UHVG Environment

Vacuum Linear Stage Compact

Displacement : 12.5 ~ 25 mm

Step Size : 50 nm

Repeatability : ± 0.2 μm

Load Capacity : up to 200 N

Max. Velocity : 2 mm/s
FV, HV, UHVG Environment

Vacuum Rotation Stage Plus

Displacement : ± 360 °

Step Size : 0.0001 °

Repeatability : ± 0.0001 °

Load Capacity : 150 N

Max. Velocity : 20 °/s
FV, HV, UHV Environment

RodRail eXtreme Series

Displacement : 15 ~ 450 mm

Phytron VSS Stepper Motor

XYZ, Gantry Assemblies

Closed-loop Operation

Clean Design Lubricant Free

UHV, Rad Hard

XYZ FlatRail eXtreme Series

Displacement : 225 x 65 x 25 mm

Step Size : 50 nm

Reduced Magnetic Field Motor

Dry Lubricant

Space Saving Design

UHV Compliant