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8 weeks leadtime for most products!
라이모션은 고진공 환경에서의 모션제어를 위해 Phytron 사의 고진공 모터를 적용, Out-gassing 문제를 최소화된 다양한 정밀스테이지 및 시스템을 공급하고 있습니다. 또한 고객의 다양한 요구에 맞는 커스텀 진공 솔루션을 제공하고 있습니다.
Vacuum Linear Stage Basic
Displacement : 50 ~ 250 mm
Step Size : 500 nm
Repeatability : < 1 μm
Load Capacity : 150 N
Max. Velocity : 3 mm/s FV and HV Environment
Vacuum Linear Stage Plus
Step Size : 50 nm
Repeatability : ± 0.05 μm
Load Capacity : 150 N / 300 N
Max. Velocity : 3 mm/s FV, HV, UHV, UHVG Environment
Vacuum Rotation Stage Plus
Displacement : ± 360 °
Step Size : 0.0001 °
Repeatability : ± 0.0001 °
Max. Velocity : 20 °/s FV, HV, UHV Environment
RodRail eXtreme Series
Displacement : 15 ~ 450 mm
Phytron VSS Stepper Motor
XYZ, Gantry Assemblies
Closed-loop Operation
Clean Design Lubricant Free
UHV, Rad Hard
XYZ FlatRail eXtreme Series
Displacement : 225 x 65 x 25 mm
Reduced Magnetic Field Motor
Dry Lubricant
Space Saving Design
UHV Compliant