top of page

UHV SOLUTIONS

UHV X Stages
UHV X Stages
UHV Z Stages
UHV R Stages
UHV R Stages
UHV R Stages
UHV G Stages
UHV G Stages
UHV Motors
UHV Gearheads
UHV Gearheads
Stepper Motor Drives
Stepper Motor Drives
UHV Connectors
UHV Connectors
UHV Connectors
UHV Connectors
UHV Limit Switch
UHV Feedthroughs
UHV Feedthroughs
Vacuum Gauges
Vacuum Gauges
Gauge Controller
Customized Solutions
VSM23-X

Travel Range : 100 ~ 450 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 20 kg
Maximum Speed : 25 mm/s
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-X

Travel Range : 50 ~ 200 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 50 kg
Maximum Speed : 15 mm/s
Directly Stackable For XYZ Orientations

VSM17-Z

Travel Range : 50 ~ 70 mm
Mechanical Resolution : 1 µm
Load Capacity : 30 kg
Maximum Speed : 5 mm/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-R-72K

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.005 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-R-3K6

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.1 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

RSB Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.036 ~ 0.004 °
Load Capacity : Up to 1 kg
Maximum Speed : Up to 1 sec/rev 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Manual
Video
VSM17-G-070

Travel Range : ±15 °
Mechanical Resolution : 0.005 °
Load Capacity : 40 kg
Maximum Speed : 25 °/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-G-114

Travel Range : ±180 °
Mechanical Resolution : 0.005 °
Load Capacity : 20 kg
Maximum Speed : 4 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

UHV Stepper Motor

Holding Torque : 75 ~ 1,000 mNm
Detent Torque : 8 ~ 30 mNm
Step angle of 1.8°
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar

UHV Spur Gearhead

Reduction Ratio : 5 : 1
Nominal Output Torque : 350 mNm
Maximum Acceleration Torque : 450 mNm
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Manual
Video
UHV Planetary Gearheads

Reduction Ratio : 4 ~100 : 1
Maximum Input Speed : 8000 RPM
Service Life : > 10,000 H
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Manual
Video
SMD3 Stepper Motor Drive

Single-Channel UHV Stepper Motor Driver
USB C Communication Interface
Up to 256x Micro-Step Resolution
2 x Limit Inputs With Homing Functionality
Operating Temperature: 10 ~ 60 °C

SMD4 Stepper Motor Drive

Single-Channel UHV Stepper Motor Driver
USB, Ethernet and RS485 Communication Interfaces
Up to 256x Micro-Step Resolution
2 x Limit Inputs With Homing Functionality
Operating Temperature: 10 ~ 60 °C

Manual
Video
MLF18VCF Connectors

18-Way Male and Female UHV Connectors
PEEK Material
Gold Plated Pin Connectors
Bakeable to 250 °C
Mates With MLF18F Feedthrough

VC9DF & VC15DF Connectors

9 & 15-Way Female UHV Connectors
PEEK Material
Gold Plated Pin Connectors
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
VCC7 Connectors

7-Way Male and Female UHV Connectors
PEEK Material
Gold Plated Pin Connectors
Bakeable to 250 °C
Surface Mountable

Data Sheet
Manual
Video
PEEK Wiring Bushes

6-Way UHV Terminal Block
PEEK Material
SS Barrel Connectors & Grub Screws
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
UHV Compatible Limit Switch

Overtravel : 2 mm
Repeatability : ± <1 µm
Normally-Closed (NC)
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
MLF18F Electrical Feedthroughs

18-Way Feedthrough on DN40 CF (70 mm OD)
Male to Male Connection
1.5 mm Gold Plated Pins
Bakeable to 250 °C
Suitable For Use To 1 x 10⁻⁹ mBar

VF9D-40CF & VF15D-63CF

9-Way Feedthrough on DN40CF Flange (70 mm OD)
15-Way Feedthrough on DN63CF Flange (114 mm OD)
Male to Male Connection
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
AGP-1 Active Pirani Gauge

Measurement Range of 1 x 10⁻⁶ ~ 1200 mBar
Ultra-wide Range High Performance MEMS Sensors
Advanced Innovative Digital Signal Processing
Precision Gas-Independent Sensor From 5 to 1200 mBar
High Overpressure Tolerance of 10 bar (145 psi)

AIG1xG Passive Ion Gauge

Measurement Range of 1 x 10⁻³ ~ 3 x 10⁻¹¹ mBar
Degassing by Electron-Bombardment
Maximum Bakeout Temperature 450 °C
Sensitivity 19 per Millibar For Nitrogen
X-ray Asymptote 3 x 10⁻¹¹ mBar

NGC3 Ion Gauge Controller

Continuous Measurement Range: 1200 ~ 3 x 10⁻¹¹ mBar
RS-232C Interface
Multiple Ion Gauge Modes
Sensitivity Adjustable 1 mBar⁻¹ To 140 mBar⁻¹
1U High Full-Width For Easy Rack-Mounting

Customized Solutions

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 100 kg
Encoder Options : Absolute & Incremental Encoder

Data Sheet
Manual
Video
bottom of page