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라이모션은 고정밀 얼라인먼트에 적용가능한 정밀스테이지 및 시스템을 제공합니다.
3-Axis Motion Control
Displacement : 10mm
Resolution : Down to 1 nm
Load Capacity : Lifts up to 0.3 kg
Smooth Continuous Motion
Fast & Simple OEM Integration
Trapezoidal Velocity Profiles
XXZƟ Motion System
Linear Travel Range : 1 x 0.3 m in XZ
Minimum Incremental Motion : 0.1 μm
Straightness : ± 0.4 μm in X
Straightness : ± 0.2 μm in Z
Pitch / Yaw / Roll : ± 2 / 3 / 3 μrad in X
Pitch / Roll : ± 7 / 2 μrad in Z
