UHV Environment : 10⁻⁸ mbar
Prevents Outgassing by Special Materials
Low Thermal Resistance Motor Design 
Equipped Temperature Sensors
Flexible for Customized Solutions

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 400 nm  
Load Capacity : 50 kg, 450 N 
Width 165 mm (S165-IL)_Ironless

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 300 nm  
Load Capacity : 120 kg, 1200 N 
Width 225 mm (S225-IL)_Ironless

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 400 nm  
Load Capacity : 45 kg, 450 N
Width 165 mm (G165-IL)_Ironless

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 300 nm  
Load Capacity : 120 kg, 1200 N
Width 225 mm (G225-IL)_Ironless

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 300 nm  
Load Capacity : 80 kg, 650 N
Width 190 mm (G190-IC)_Iron Core

Travel Range : 100 ~ 1200 mm 
Speed : 2 m/s
Repeatability : ± 300 nm  
Load Capacity : 185 kg, 1850 N
Width 280 mm (G280-IC)_Iron Core

Travel Range : 230 x 230 mm
Repeatability : ±30 nm
Accuracy : ±120 nm
Load Capacity : 20 kg
Max. Velocity : 400 mm/s

Travel Range : ±60 mm
Repeatability : ±0.1 μm
Accuracy : ±0.275 μm (Plus)
Load Capacity : 14 kg
Max. Velocity : 0.2 m/s

Repeatability : ±1.5 arcsec
Accuracy : ±2.5 arcsec
Axial & Radial Runout : ±0.5 µm
Rated Speed : 3600 RPM
Load Capacity : 52 kg

Repeatability : ±1.5 arcsec
Accuracy : ±2.5 arcsec
Axial & Radial Runout : ±0.5 µm
Rated Speed : 3600 RPM
Load Capacity : 52 kg

Repeatability : ±1 arcsec
Accuracy : ±1.5 arcsec
Axial Runout : <100 nm
Radial Runout : <200 nm
Load Capacity : 80 kg

Travel Range : 24mm in Z
Repeatability : ±0.2 μm in Z
Accuracy : ±0.4 μm in Z
Load Capacity : 2.7 kg
Position Stability : ±15 nm

Travel Range : 155 x 25mm in XZ
Repeatability : ±0.5 μm in X
Repeatability : ±0.2 μm in Z
Accuracy : ±0.4 μm in Z
Load Capacity : 2 kg

Travel Range : ±5mm & ±0.2° in ZTipTilt
Repeatability : ±0.03 μm in Z
Accuracy : ±0.02 μm in Z
Load Capacity : 2 kg
Position Stability : ±15 nm

Travel Range : 456 x 355mm in XY
Repeatability : ±0.35 μm in XY
Repeatability : ±0.02 μm in Z
Accuracy : ±0.8 μm in XY / ±0.01 μm in Z
Load Capacity : 2 kg