PIEZOMOTOR SYSTEMS

Ultrasonic Piezomotor Stage (초음파 피에조 모터 스테이지)
Walking Piezomotor Stage (스텝 피에조 모터 스테이지)
Stick-slip Piezomotor Stage (스틱-슬립 피에조 모터 스테이지)

Actuator & Mirror Mount

Walking X Stage

Walking R Stage

Walking Z Stage

Walking TipTilt Stage

Walking XYR Stage

Walking HexStage

Walking Piezo Controller

스텝 피에조 리니어 액추에이터
Walking Piezo Linear Actuator

Travel Range : 9 mm (13 °)
Resolution : 2 nm (0.05 µrad)
Repeatability : ± 200 nm (± 0.05 µrad)
Drive Force : 10 N
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 리니어 스테이지
Walking Piezo Linear Stage

Travel Range : 20 / 35 / 50 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm
Load Capacity : 2 kg
HV (10⁻⁶ hPa) Option

스텝 피에조 로테이션 스테이지
Walking Piezo Rotation Stage

Size : 45 x 45 x 23 mm
Min. Incremental Motion : 10 µ°
Load Capacity : 2 kg
Operating & Holding Torque : > 90 mNm
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 Z 스테이지
Walking Piezo Z Stage

Travel Range : 10 mm
Min. Incremental Motion : 2 nm
Repeatability : ± 100 nm
Load Capacity : 0.5 kg / 1 kg
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 TipTilt 스테이지
Walking Piezo TipTilt Stage

Travel Range in Z :
Travel Range in Θ(XY) : ±3 °
Min. Incremental Motion : 2 nm
Load Capacity : 1 kg / 2.5 kg
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 XYR 스테이지
Walking Piezo XYR Stage

Travel Range in XY :
Travel Range in Θ(R) : ±10 °
Min. Incremental Motion : 2 nm
Load Capacity : 10 kg
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 6축 스테이지
Walking Piezo HexStage

Travel Range in XYZ : ±5 mm
Travel Range in Θ(XYZ) : ±10 °
Min. Incremental Motion : 2 nm
Load Capacity : 1 kg / 2.5 kg
HV (10⁻⁶ hPa) Option

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 컨트롤러
Walking Piezo Controller

3 Axes (6 with Two Daisy-Chained)
USB C & RS485 Communication Interfaces
Libraries for LabVIEW, C++
Digital IO For Trigger Function
Operating Temperature: 0 ~ 50 °C

Data Sheet

Manual

Video

3D Drawing

스텝 피에조 OEM 컨트롤러
Walking Piezo Controller

Up to 4 Axes (Stacked Design)
USB C & RS485 Communication Interfaces
Libraries for LabVIEW, C++
39 x 59 x 10 mm Size (Only 1 Board)
Operating Temperature: 0 ~ 50 °C

Data Sheet

Manual

Video

3D Drawing