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UHV & CRYO

UHV Linear & Rotation Stages (고진공 모터 스테이지)
UHV Connectors & Feedthroughs (고진공 커넥터 & 피드쓰루)
Cryo Positioning Stage (극저온 스테이지)

UHV X Stages
UHV X Stages
UHV X Stage
UHV Z Stages
UHV R Stages
UHV R Stages
UHV R Stages
UHV R Stage
UHV G Stages
UHV G Stages
UHV Motors
UHV Gearheads
UHV Limit Switch
Stepper Motor Drives
UHV Connectors
UHV Feedthroughs
UHV Feedthroughs
Customized Solutions
Cryo Linear Stages
Cryo Rotary Stages
Cryo Gonio Stages
Cryo Scanner Stages
Cryo Long Travel Stages
Cryo 3D Rotary Stage
Cryo Motion Controllers
Cryo Accessories
Ultra Compact Stage
Piezo Linear Actuator
진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 100 ~ 450 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 20 kg
Maximum Speed : 25 mm/s
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 50 ~ 200 mm
Resolution : 5 µm (0.02 µm 256 x)
Load Capacity : 50 kg
Maximum Speed : 15 mm/s
Directly Stackable For XYZ Orientations

진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 500 ~ 100 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 40 kg
Maximum Speed : 25 mm/s
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 리니어 Z 스테이지
Vacuum Z Stage

Travel Range : 50 ~ 70 mm
Mechanical Resolution : 1 µm
Load Capacity : 30 kg
Maximum Speed : 5 mm/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.036 ~ 0.004 °
Load Capacity : Up to 1 kg
Maximum Speed : Up to 1 sec/rev 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.1 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.005 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.005 °
Load Capacity : 250 kg
Maximum Speed : 5 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 고니오미터 스테이지
Vacuum Goniometer Stage

Travel Range : ±15 °
Mechanical Resolution : 0.005 °
Load Capacity : 40 kg
Maximum Speed : 25 °/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 고니오미터 스테이지
Vacuum Goniometer Stage

Travel Range : ±180 °
Mechanical Resolution : 0.005 °
Load Capacity : 20 kg
Maximum Speed : 4 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 스텝모터
Vacuum Compatible Step Motor

Holding Torque : 75 ~ 1,000 mNm
Detent Torque : 8 ~ 30 mNm
Step angle of 1.8°
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar

진공 스텝모터 감속기
Vacuum Gearhead

Reduction Ratio : 4 ~100 : 1
Nominal Output Torque : 0.35 ~ 22.5 Nm
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar 
For D35.1 / D42 / D57 UHV Motor

진공 리미트스위치
Vacuum Compatible Limit Switch

Overtravel : 2 mm
Repeatability : ± <1 µm
Normally-Closed (NC)
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

스텝모터 드라이브
Step Motor Drive

Single-Channel UHV Stepper Motor Driver
USB, Ethernet and RS485 Interfaces
Up to 256x Micro-Step Resolution
2 x Limit Inputs With Homing Functionality
Operating Temperature: 10 ~ 60 °C

진공 커넥터
Vacuum Compatible Connector

18 / 15 / 9 / 7 / 6-Way M&F UHV Connectors
PEEK Material
Gold Plated Pin Connectors
Bakeable to 250 °C
Mates With Various Feedthrough

진공 피드쓰루
Vacuum Feedthrough

18-Way Feedthrough on DN40 CF
Male to Male Connection
1.5 mm Gold Plated Pins
Bakeable to 250 °C
Suitable For Use To 1 x 10⁻⁹ mBar

진공 피드쓰루
Vacuum Compatible Feedthrough

9-Way Feedthrough on DN40CF Flange (70 mm OD)
15-Way Feedthrough on DN63CF Flange
Male to Male Connection
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

커스텀 : 다축 모션 시스템
Custom : Multi-Axis

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 100 kg
Encoder Options : Absolute & Incremental

Data Sheet
Manual
Video
3D Drawing
극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 16 / 25 / 35 mm 
Fine Tune Resolution @ 2 K : Sub-nm
Max. Load : Up to 2.5 kg
Drive Force : Up to 5 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

극저온 로테이션 스테이지
Cryo Rotation Stage

Travel Range : 360 ° (Sensor Range 320 °)
Fine Tune Resolution @ 2 K : Down to 3 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 2.5 Ncm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

극저온 고니오미터 스테이지
Cryo Stick-slip Goniometer Stage

Travel Range : Up to 12 °
Fine Tune Resolution @ 2 K : 0.5 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

극저온 스캐닝 스테이지
Cryo Scanner Stage

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 10 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 30 ~ 200 mm 
Sensor Resolution : 150 nm
Max. Load : Up to 2 kg
Drive Force : 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

극저온 3D 모션 스테이션
Cryo 3D Rotary Station

Travel Range : 360 ° (Theta & Phi)
Basic Module : Rotator16 & Rotator25
Pure Ti or BeCu (Option)
Compatible Cryostats : 49mm Bore Size 
1.6 K, 1e-7 mbar, 35 Tesla (10 mK & UHV)

Manual
Video
3D Drawing
극저온 스테이지 컨트롤러
Cryo Stage Controller

1 & 6 Channels for Motion Stages
3 Channels for Scanner Stages
USB & TCP/IP Interface
Libraries for LabVIEW
Dimensions : 430 x 358 x 90 mm

Manual
Video
3D Drawing
극저온 악세사리
Cryo Accessories

Adapter Plates
Flexible Thermal Connection Set
Tool Box
- BeCu Screws for 30 mK & 18 Tesla
- Connectors for 30 mK & 18 Tesla

Manual
Video
3D Drawing
초소형 리니어 스테이지
Miniature Stick-slip Linear Stage

Travel Range : 10 mm 
Min. Incremental Motion : 10 nm
Load Capacity : 300 g 
Dimensions : 20 x 20 x 12 mm 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Manual
Video
3D Drawing
피에조모터 리니어 액추에이터
Piezomotor Actuator

Travel Range : 10 mm 
Min. Incremental Motion : 20 nm
Drive Force : 20 N 
Holding Force : 100 N 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Manual
Video
3D Drawing
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