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UHV & CRYO

UHV Linear & Rotation Stages (고진공 모터 스테이지)
UHV Connectors & Feedthroughs (고진공 커넥터 & 피드쓰루)
Cryo Positioning Stage (극저온 스테이지)

UHV Stepper Motor
UHV Servo Motor
UHV Gearbox
UHV X Actuator
UHV X Stage
UHV X Stage
UHV X Stage
UHV R Stage
UHV Filter Wheel
UHV 6-Axis Stage
UHV Limit Switch
Multi-Axis Solutions
Customized Solutions
Cryostat
Cryo Linear Stage
Cryo Rotary Stage
Cryo Gonio Stage
Cryo Scanner Stage
Cryo Scanner Stage (Closed-Loop)
Cryo Long Travel Stage
Cryo Motion Controller
Ultra Compact Stage
Piezo Linear Actuator
Objective
Sample Mount
Optical Experiment
Optical Experiment
Cryo Accessories
고진공 스텝모터
UHV Stepper Motor

Frame Size : 20 ~ 86 mm
Step Angle : 1.8 ° & 0.9 °
Rated Current : 0.5 ~ 6 A
Operating Temperature : -196 ~ 300 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
고진공 서보모터
UHV Servo Motor

Frame Size : 40 ~ 130 mm
Supply Voltage : 24 VDC ~ 440 VAC
Rated Power : 50 ~ 7500 W
Operating Temperature : -196 ~ 200 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
고진공 기어박스
UHV Gearbox

Frame Size : 45 ~ 142 mm
Ratio : 3 : 1 ~ 1000 : 1
Rated Input Speed : 6000 ~ 3000 RPM
Operating Temperature : -196 ~ 200 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 리니어 액츄에이터
Vacuum Linear Actuator

Travel Range : 13, 26, 52 mm
Min. Step Size : 0.1 µm
Repeatability : ±1 µm
Force Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 소형 리니어 스테이지
Vacuum Linear Stage

Travel Range : 13, 26, 52, 104 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 200 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 5 N / Carrier
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 °
Min. Step Size : 0.0001 °
Repeatability : ±0.0001 °
Load Capacity : 150 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 필터 휠
Vacuum Filter Wheel

Travel Range : 360 °
Min. Step Size : 0.001 °
Repeatability : <0.01 °
Load Capacity : 50 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 6축 모션 스테이지
Vacuum 6-Axis Motion Stage

Linear Travel Range : 16 / 50 / 18 mm in XYZ
Angular Travel Range : 30 / 15 / 10 ° in RxRyRz
Min. Step Size : 0.1 μm
Load Capacity : 35 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 리미트스위치
Vacuum Compatible Limit Switch

Overtravel : 2 mm
Repeatability : <0.5 µm
Normally-Closed (NC)
Bakeable to 200 °C
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
커스텀 : 다축 모션 시스템
Custom : Multi-Axis

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 10 kg
Encoder Options : Absolute & Increment

Data Sheet
Manual
Video
3D Drawing
커스텀 : 짐벌 스테이지
Custom : Gimbal Stage

Travel Range : 13 mm & ±5 °
Min. Step Size : 50 nm & 0.0001 °
Repeatability : ±50 nm & ±0.0001 °
For 25mm or 1" Mirror
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
극저온 챔버
Optical Cryostat

Ultra Low Vibration & Low Temperature 
Minimum Temperature : 2.8 K (Optional)
Vibration Amplitude : 5 nm (Optional) 
Optical Windows : 8 + 1 (Optional)
Chamber Size : ∅100 & ∅200 mm

Data Sheet
Manual
Video
3D Drawing
극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 16 / 25 / 35 mm 
Fine Tune Resolution @ 2 K : Sub-nm
Max. Load : Up to 2.5 kg
Drive Force : Up to 5 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Data Sheet
Manual
Video
3D Drawing
극저온 로테이션 스테이지
Cryo Rotation Stage

Travel Range : 360 ° (Sensor Range 320 °)
Fine Tune Resolution @ 2 K : Down to 3 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 2.5 Ncm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 고니오미터 스테이지
Cryo Stick-slip Goniometer Stage

Travel Range : Up to 12 °
Fine Tune Resolution @ 2 K : 0.5 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 스캐닝 스테이지
Cryo Scanner Stage

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 10 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 스캐닝 스테이지 (Closed-Loop)
Cryo Scanner Stage (Closed-Loop)

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 5 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 30 ~ 200 mm 
Sensor Resolution : 150 nm
Max. Load : Up to 2 kg
Drive Force : 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Data Sheet
Manual
Video
3D Drawing
극저온 스테이지 컨트롤러
Cryo Stage Controller

1 & 6 Channels for Motion Stages
3 Channels for Scanner Stages
USB & TCP/IP Interface
Libraries for LabVIEW
Dimensions : 430 x 358 x 90 mm

Data Sheet
Manual
Video
3D Drawing
초소형 리니어 스테이지
Miniature Stick-slip Linear Stage

Travel Range : 10 mm 
Min. Incremental Motion : 10 nm
Load Capacity : 300 g 
Dimensions : 20 x 20 x 12 mm 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
피에조모터 리니어 액추에이터
Piezomotor Actuator

Travel Range : 10 mm 
Min. Incremental Motion : 20 nm
Drive Force : 20 N 
Holding Force : 100 N 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
극저온 렌즈
Low Temperature Objective

Working Distance : 1 / 13 / 6 mm
Number Aperture (N.A.) : 0.90 / 0.36 / 0.60
Focal Length : 2.67 / 6.47 / 3.87 mm 
Length : 59.5 / 64 / 71 mm
4-350 K, Non Magnetic & High Vacuum

Data Sheet
Manual
Video
3D Drawing
샘플 고정 마운트
Sample Mount

Horizontal & Transmission DC & RF Block
8 Gold Plated Pads for Sample Wiring
2 mm Pitch Straight Female Socket 
FR4/Copper Composite Material
Central 10 mm x 10 mm Copper Area

Data Sheet
Manual
Video
3D Drawing
극저온 챔버 시스템
Optical Experiment

Optical Transmission & Waveguide Excitation Experiment
Objectives : Excitation & Collection
Motion Systems : Sample & Objective 
Radiation Shield Design
Optical Path Design in Vacuum Chamber

Data Sheet
Manual
Video
3D Drawing
극저온 챔버 시스템
Optical Experiment

Optical Transmission & Waveguide Excitation Experiment
Objectives : Excitation & Collection
Motion Systems : Sample & Objective 
Radiation Shield Design
Optical Path Design in Vacuum Chamber

Data Sheet
Manual
Video
3D Drawing
극저온 악세사리
Cryo Accessories

Adapter Plates
Flexible Thermal Connection Set
Tool Box
- BeCu Screws for 30 mK & 18 Tesla
- Connectors for 30 mK & 18 Tesla

Data Sheet
Manual
Video
3D Drawing
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