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UHV & CRYO

UHV Linear & Rotation Stages (고진공 모터 스테이지)
UHV Connectors & Feedthroughs (고진공 커넥터 & 피드쓰루)
Cryo Positioning Stage (극저온 스테이지)

UHV X Stages
UHV X Stages
UHV Z Stages
UHV R Stages
UHV R Stages
UHV R Stages
UHV G Stages
UHV G Stages
UHV Motors
UHV Gearheads
UHV Limit Switch
Stepper Motor Drives
UHV Connectors
UHV Feedthroughs
UHV Feedthroughs
Customized Solutions
Cryo Linear Stages
Cryo Rotary Stages
Cryo Gonio Stages
Cryo Scanner Stages
Cryo Long Travel Stages
Cryo 3D Rotary Stage
Cryo Motion Controllers
Cryo Accessories
Ultra Compact Stage
Piezo Linear Actuator
VSM23-X

Travel Range : 100 ~ 450 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 20 kg
Maximum Speed : 25 mm/s
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-X

Travel Range : 50 ~ 200 mm
Resolution : 5 µm (0.02 µm 256 x Micro-Step)
Load Capacity : 50 kg
Maximum Speed : 15 mm/s
Directly Stackable For XYZ Orientations

VSM17-Z

Travel Range : 50 ~ 70 mm
Mechanical Resolution : 1 µm
Load Capacity : 30 kg
Maximum Speed : 5 mm/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-R-72K

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.005 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-R-3K6

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.1 °
Load Capacity : 100 kg
Maximum Speed : Up to 100 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

RSB Rotation Stage

Travel Range : 360 ° Continuous
Mechanical Resolution : 0.036 ~ 0.004 °
Load Capacity : Up to 1 kg
Maximum Speed : Up to 1 sec/rev 
Suitable For Use To 1 x 10⁻¹⁰ mBar

Manual
Video
VSM17-G-070

Travel Range : ±15 °
Mechanical Resolution : 0.005 °
Load Capacity : 40 kg
Maximum Speed : 25 °/s 
Suitable For Use To 1 x 10⁻¹⁰ mBar

VSM17-G-114

Travel Range : ±180 °
Mechanical Resolution : 0.005 °
Load Capacity : 20 kg
Maximum Speed : 4 RPM 
Suitable For Use To 1 x 10⁻¹⁰ mBar

UHV Stepper Motor

Holding Torque : 75 ~ 1,000 mNm
Detent Torque : 8 ~ 30 mNm
Step angle of 1.8°
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar

UHV Spur Gearhead

Reduction Ratio : 4 ~100 : 1
Nominal Output Torque : 0.35 ~ 22.5 Nm
Operating Temperature : -65 ~ +190 °C 
Suitable For Use To 1 x 10⁻¹⁰ mBar 
For D35.1 / D42 / D57 UHV Motor

UHV Compatible Limit Switch

Overtravel : 2 mm
Repeatability : ± <1 µm
Normally-Closed (NC)
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
SMD4 Stepper Motor Drive

Single-Channel UHV Stepper Motor Driver
USB, Ethernet and RS485 Communication Interfaces
Up to 256x Micro-Step Resolution
2 x Limit Inputs With Homing Functionality
Operating Temperature: 10 ~ 60 °C

UHV Connectors

18 / 15 / 9 / 7 / 6-Way M&F UHV Connectors
PEEK Material
Gold Plated Pin Connectors
Bakeable to 250 °C
Mates With Various Feedthrough

MLF18F Electrical Feedthroughs

18-Way Feedthrough on DN40 CF (70 mm OD)
Male to Male Connection
1.5 mm Gold Plated Pins
Bakeable to 250 °C
Suitable For Use To 1 x 10⁻⁹ mBar

VF9D-40CF & VF15D-63CF

9-Way Feedthrough on DN40CF Flange (70 mm OD)
15-Way Feedthrough on DN63CF Flange (114 mm OD)
Male to Male Connection
Bakeable to 250 °C
Suitable For Use To 1.3 x 10⁻¹⁰ mBar

Manual
Video
Customized Solutions

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 100 kg
Encoder Options : Absolute & Incremental Encoder

Data Sheet
Manual
Video
Basic Linear Stages

Travel Range : 16 / 25 / 35 mm 
Fine Tune Resolution @ 2 K : Sub-nm
Max. Load : Up to 2.5 kg
Drive Force : Up to 5 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Basic Rotary Stages

Travel Range : 360 ° (Sensor Range 320 °)
Fine Tune Resolution @ 2 K : Down to 3 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 2.5 Ncm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Manual
Video
Basic Goniometer Stages

Travel Range : Up to 12 °
Fine Tune Resolution @ 2 K : 0.5 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Manual
Video
Basic Scanner Stages

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 10 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Manual
Video
Long Range Linear Stages

Travel Range : 30 ~ 200 mm 
Sensor Resolution : 150 nm
Max. Load : Up to 2 kg
Drive Force : 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Manual
Video
3D Rotary Motion Station

Travel Range : 360 ° (Theta & Phi)
Basic Module : Rotator16 & Rotator25
Pure Ti or BeCu (Option)
Compatible Cryostats : 49mm (Or Above) Bore Size 
1.6 K, 1e-7 mbar, 35 Tesla (10 mK & UHV Options)

Manual
Video
Closed-loop Controller

1 & 6 Channels for Motion Stages
3 Channels for Scanner Stages
USB & TCP/IP Interface
Libraries for LabVIEW
Dimensions : 430 x 358 x 90 mm

Manual
Video
Accessories

Adapter Plates
Flexible Thermal Connection Set
Tool Box
- BeCu Screws for 30 mK & 18 Tesla
- Connectors for 30 mK & 18 Tesla

Manual
Video
Miniature Linear Stage

Travel Range : 10 mm 
Min. Incremental Motion : 10 nm
Load Capacity : 300 g 
Dimensions : 20 x 20 x 12 mm 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Manual
Video
Piezo Linear Actuator

Travel Range : 10 mm 
Min. Incremental Motion : 20 nm
Drive Force : 20 N 
Holding Force : 100 N 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Manual
Video
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