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UHV & CRYO

UHV Linear & Rotation Stages (고진공 모터 스테이지)
UHV Connectors & Feedthroughs (고진공 커넥터 & 피드쓰루)
Cryo Positioning Stage (극저온 스테이지)

UHV Stepper Motor
UHV Servo Motor
UHV Gearbox
UHV X Actuator
UHV X Stage
UHV X Stage
UHV X Stage
UHV R Stage
UHV Filter Wheel
UHV 6-Axis Stage
UHV Limit Switch
Multi-Axis Solutions
Customized Solutions
Cryo Linear Stage
Cryo Rotary Stage
Cryo Gonio Stage
Cryo Scanner Stage
Cryo Long Travel Stage
Cryo 3D Rotary Stage
Cryo Motion Controller
Cryo Accessories
Ultra Compact Stage
Piezo Linear Actuator
고진공 스텝모터
UHV Stepper Motor

Frame Size : 20 ~ 86 mm
Step Angle : 1.8 ° & 0.9 °
Rated Current : 0.5 ~ 6 A
Operating Temperature : -196 ~ 300 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
고진공 서보모터
UHV Servo Motor

Frame Size : 40 ~ 130 mm
Supply Voltage : 24 VDC ~ 440 VAC
Rated Power : 50 ~ 7500 W
Operating Temperature : -196 ~ 200 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
고진공 기어박스
UHV Gearbox

Frame Size : 45 ~ 142 mm
Ratio : 3 : 1 ~ 1000 : 1
Rated Input Speed : 6000 ~ 3000 RPM
Operating Temperature : -196 ~ 200 °C
Suitable For Use To 1 x 10⁻⁹ hPa & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 리니어 액츄에이터
Vacuum Linear Actuator

Travel Range : 13, 26, 52 mm
Min. Step Size : 0.1 µm
Repeatability : ±1 µm
Force Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 소형 리니어 스테이지
Vacuum Linear Stage

Travel Range : 13, 26, 52, 104 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 30 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 200 N
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 리니어 스테이지
Vacuum Linear Stage

Travel Range : 15 ~ 450 mm
Min. Step Size : 0.1 µm
Repeatability : <1 µm
Load Capacity : 5 N / Carrier
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
진공 로테이션 스테이지
Vacuum Rotation Stage

Travel Range : 360 °
Min. Step Size : 0.0001 °
Repeatability : ±0.0001 °
Load Capacity : 150 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 필터 휠
Vacuum Filter Wheel

Travel Range : 360 °
Min. Step Size : 0.001 °
Repeatability : <0.01 °
Load Capacity : 50 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 6축 모션 스테이지
Vacuum 6-Axis Motion Stage

Linear Travel Range : 16 / 50 / 18 mm in XYZ
Angular Travel Range : 30 / 15 / 10 ° in RxRyRz
Min. Step Size : 0.1 μm
Load Capacity : 35 N
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
진공 리미트스위치
Vacuum Compatible Limit Switch

Overtravel : 2 mm
Repeatability : <0.5 µm
Normally-Closed (NC)
Bakeable to 200 °C
Suitable For Use To 1 x 10⁻⁹ mbar & Cryo

Data Sheet
Manual
Video
3D Drawing
커스텀 : 다축 모션 시스템
Custom : Multi-Axis

Vacuum-Suitable Manufacturing Processes
Careful Selection of Materials
Consideration Of Outgassing Behavior
Load Capacity Up To Several 10 kg
Encoder Options : Absolute & Increment

Data Sheet
Manual
Video
3D Drawing
커스텀 : 짐벌 스테이지
Custom : Gimbal Stage

Travel Range : 13 mm & ±5 °
Min. Step Size : 50 nm & 0.0001 °
Repeatability : ±50 nm & ±0.0001 °
For 25mm or 1" Mirror
Suitable For Use To 1 x 10⁻⁹ mbar

Data Sheet
Manual
Video
3D Drawing
극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 16 / 25 / 35 mm 
Fine Tune Resolution @ 2 K : Sub-nm
Max. Load : Up to 2.5 kg
Drive Force : Up to 5 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Data Sheet
Manual
Video
3D Drawing
극저온 로테이션 스테이지
Cryo Rotation Stage

Travel Range : 360 ° (Sensor Range 320 °)
Fine Tune Resolution @ 2 K : Down to 3 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 2.5 Ncm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 고니오미터 스테이지
Cryo Stick-slip Goniometer Stage

Travel Range : Up to 12 °
Fine Tune Resolution @ 2 K : 0.5 μ°
Max. Load : Up to 0.5 kg
Drive Torque : Up to 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 스캐닝 스테이지
Cryo Scanner Stage

Travel Range : Up to 100 μm in XYZ
Resolution : Down to 0.5 nm
Max. Load : Up to 0.5 kg
Repeatability : < 10 nm 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 리니어 스테이지
Cryo Stick-slip Linear Stage

Travel Range : 30 ~ 200 mm 
Sensor Resolution : 150 nm
Max. Load : Up to 2 kg
Drive Force : 3 N 
1.4 K, 1e-7 mbar, 35 Tesla (30 mK & UHV Options)

Data Sheet
Manual
Video
3D Drawing
극저온 3D 모션 스테이션
Cryo 3D Rotary Station

Travel Range : 360 ° (Theta & Phi)
Basic Module : Rotator16 & Rotator25
Pure Ti or BeCu (Option)
Compatible Cryostats : 49mm Bore Size 
1.6 K, 1e-7 mbar, 35 Tesla (10 mK & UHV)

Data Sheet
Manual
Video
3D Drawing
극저온 스테이지 컨트롤러
Cryo Stage Controller

1 & 6 Channels for Motion Stages
3 Channels for Scanner Stages
USB & TCP/IP Interface
Libraries for LabVIEW
Dimensions : 430 x 358 x 90 mm

Data Sheet
Manual
Video
3D Drawing
극저온 악세사리
Cryo Accessories

Adapter Plates
Flexible Thermal Connection Set
Tool Box
- BeCu Screws for 30 mK & 18 Tesla
- Connectors for 30 mK & 18 Tesla

Data Sheet
Manual
Video
3D Drawing
초소형 리니어 스테이지
Miniature Stick-slip Linear Stage

Travel Range : 10 mm 
Min. Incremental Motion : 10 nm
Load Capacity : 300 g 
Dimensions : 20 x 20 x 12 mm 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
피에조모터 리니어 액추에이터
Piezomotor Actuator

Travel Range : 10 mm 
Min. Incremental Motion : 20 nm
Drive Force : 20 N 
Holding Force : 100 N 
UHV (10⁻¹¹ mbar) & Non Magnetic Options

Data Sheet
Manual
Video
3D Drawing
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