Travel Range : 12 / 25 mm 
Min. Step Size : 200 nm with 128 x Micro-Step
Bi-Repeatability : < 6 μm 
Drive Force : Up to 50 N 
HV / UHV / Cleanroom Compatible Options

Travel Range : 100 ~ 400 mm 
Min. Step Size : 50 nm
Repeatability : ± 100 nm  
Load Capacity : 45 kg, 450 N 
Width 165 mm (S165-B/5)

Travel Range : 50 ~ 400 mm 
Speed : 500 mm/s
Repeatability : ± 100 nm  
Load Capacity : 42 kg, 420 N
Width 115 mm (G115-B/5)

Travel Range : 100 ~ 1200 mm 
Speed : 500 mm/s
Repeatability : ± 100 nm  
Load Capacity : 80 kg, 800 N
Width 190 mm (G190-B/5)

Travel Range : 50 ~ 190 mm 
Min. Step Size : 100 nm with 50 x Micro-Step
Repeatability : < 2 μm 
Large Aperture for Microscopy 
HV / UHV / Cleanroom Compatible Options

Rotation Stages with Step / DC / DD Motor
Min. Step Size : 0.001 ° (IMS)
Repeatability : < 0.005 ° (IMS) 
Drive Torque : Up to 30 Nm 
HV / UHV / Cleanroom Compatible Options

System Rails, Slides, Profiles, Mounting Cubes
Pin & Columns, Grid Boards, Accessories
With Knurled or Hexagon Socket Head Cap Screw
For HV & UHV Environment 
Option : Customized Modifications

Fine-Thread Screws : 3 ~ 18 mm
Linear, XY & Elevation Stages : 3 ~ 400 mm
Rotation & Goniometer Stages
Twist & Tilt Stages
For HV & UHV Environment

Highest Precision & Reliability
High Flexibility & Customization
Tested & Measurement for System Quality
Safely Packed & Delivered on The Agreed Date
Assembly & Measurement in ISO5 Cleanroom