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MANUAL & MOTOR

Optical Components for Vacuum (진공 옵틱 홀더 및 미러 마운트)
Manual Stage for Vacuum & Cleanroom (진공 수동 스테이지)
Motorized Stages (정밀 리니어 & 로테이션 스테이지)

Beam Handling Systems
Optical Components
Manual Stages
Motorized X Actuators
Motorized X Stages
Linear X Stage
Linear X Stage
Motorized XY Stages
Motorized Z Stages
Motorized R Stages
Torque R Stage
Motorized G Stages
Motor Controllers
Customizing Solutions
Customizing for Cleanroom
Beam Handling Systems

System Rails, Slides, Profiles, Mounting Cubes
Pin & Columns, Grid Boards, Accessories
With Knurled or Hexagon Socket Head Cap Screw
For HV & UHV Environment 
Option : Customized Modifications

Manual
Video
Optical Components

Optic Holders & Mirror Mounts
Filter Slides & Holders, Filter Wheels
Shutters, Rotary & Tllt Units
Accessories Optomechanics 
For HV & UHV Environment

Manual
Video
Manual Stages

Fine-Thread Screws : 3 ~ 18 mm
Linear, XY & Elevation Stages : 3 ~ 400 mm
Rotation & Goniometer Stages
Twist & Tilt Stages
For HV & UHV Environment

Manual
Video
Motorized Actuator

Travel Range : 12 / 25 mm 
Min. Step Size : 200 nm with 128 x Micro-Step
Bi-Repeatability : < 6 μm 
Drive Force : Up to 50 N 
HV / UHV / Cleanroom Compatible Options

Manual
Video
Motorized Linear Stages

Travel Range : 10 ~ 1500 mm 
Min. Step Size : 50 nm (IMS)
Repeatability : < 500 nm (IMS) 
Load Capacity : Up to 1500 N 
HV / UHV / Cleanroom Compatible Options

Direct Driven Linear Stages

Travel Range : 40 mm 
Min. Step Size : 50 nm
Repeatability : < 500 nm 
Velocity : 750 mm/s 
Peak Force : 33.5 N

Direct Driven Linear Stages

Travel Range : 300 mm 
Min. Step Size : 50 nm
Repeatability : < 500 nm 
Velocity : 950 mm/s 
Peak Force : 33.5 N

Motorized XY Stages

Travel Range : 50 ~ 190 mm 
Min. Step Size : 500 nm with 128 x Micro-Step
Repeatability : < 2 μm (IMS) 
Large Aperture for Microscopy 
HV / UHV / Cleanroom Compatible Options

Manual
Video
Motorized Elevation Stages

Travel Range : 12 ~ 30 mm 
Min. Step Size : 50 nm (IMS)
Repeatability : < 500 nm (IMS) 
Load Capacity : Up to 300 N 
HV / UHV / Cleanroom Compatible Options

Manual
Video
Motorized Rotation Stages

Rotation Stages with Step / DC / DD Motor
Min. Step Size : 0.001 ° (IMS)
Repeatability : < 0.005 ° (IMS) 
Drive Torque : Up to 30 Nm 
HV / UHV / Cleanroom Compatible Options

Manual
Video
Direct Driven Rotation Stages

Resolution : 3,276,800 Impulse
Repeatability : < 0.001 °
Runout : < 5 µm 
Wobble : <0.015 ° 
Velocity : 3000 °/s

Motorized Gonio Stages

Travel Range : ±10 / ± 20 °
Min. Step Size : 0.005 °
Repeatability : < 0.01 ° 
Load Capacity : Up to 200 N 
HV / UHV / Cleanroom Compatible Options

Manual
Video
Motor Controllers

Up To 9-Axis Controllable 
Micro-Step Up To 256x
USB, RS 232 & Ethernet Interfaces 
Point-to-Point Operation, Programmable Velocity Profiles 
Circular & Linear Interpolation

Manual
Video
Customizing Solutions

Highest Precision & Reliability
Investment Security & Guaranteed Availability
Tested & Measurement for System Quality
Safely Packed & Delivered on The Agreed Date
Upon Request : Assembled & Adjusted

Data Sheet
Manual
Customizing for Cleanroom

Highest Precision & Reliability
High Flexibility & Customization
Tested & Measurement for System Quality
Safely Packed & Delivered on The Agreed Date
Assembly & Measurement in ISO5 Cleanroom

Data Sheet
Manual
Video
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