System Rails, Slides, Profiles, Mounting Cubes
Pin & Columns, Grid Boards, Accessories
With Knurled or Hexagon Socket Head Cap Screw
For HV & UHV Environment 
Option : Customized Modifications

Fine-Thread Screws : 3 ~ 18 mm
Linear, XY & Elevation Stages : 3 ~ 400 mm
Rotation & Goniometer Stages
Twist & Tilt Stages
For HV & UHV Environment

Travel Range : 10 ~ 1500 mm 
Min. Step Size : 50 nm (IMS)
Repeatability : < 500 nm (IMS) 
Load Capacity : Up to 1500 N 
HV / UHV / Cleanroom Compatible Options

Travel Range : 300 mm 
Min. Step Size : 50 nm
Repeatability : < 500 nm 
Velocity : 950 mm/s 
Peak Force : 33.5 N

Travel Range : 12 ~ 30 mm 
Min. Step Size : 50 nm (IMS)
Repeatability : < 500 nm (IMS) 
Load Capacity : Up to 300 N 
HV / UHV / Cleanroom Compatible Options

Resolution : 3,276,800 Impulse
Repeatability : < 0.001 °
Runout : < 5 µm 
Wobble : <0.015 ° 
Velocity : 3000 °/s

Up To 9-Axis Controllable 
Micro-Step Up To 256x
USB, RS 232 & Ethernet Interfaces 
Point-to-Point Operation, Programmable Velocity Profiles 
Circular & Linear Interpolation

Highest Precision & Reliability
High Flexibility & Customization
Tested & Measurement for System Quality
Safely Packed & Delivered on The Agreed Date
Assembly & Measurement in ISO5 Cleanroom