PIEZO POSITIONING SYSTEMS

피에조시스템은 피에조와 정밀 센서가 결합되어 나노미터 급 분해능과 빠른 응답성을 가집니다. 이를 바탕으로 나노미터 급 정밀도가 요구되는 정밀 측정 시스템, 초고해상도 현미경, 반도체검사 장비 등에 적용가능합니다.

Piezo Actuators

Displacement : Up to 1.5 mm

Resolution : Down to 1.5 nm

Repeatability : Down to 6 nm

Linearity : Down to 0.1 %

Push/Pull Force : Up to 200/30 N

High Dynamics

Piezo Objective Scanner

Displacement : Up to 1 mm

Resolution : Down to 1 nm

Repeatability : Down to 10 nm

Linearity : Down to 0.2 %

Push/Pull Force : 20/15 N

Various Adapters

Piezo Tip/Tilt Platforms

Angle / Deflection Range : 6 / 12 mrad

Resolution : Down to 80 nrad

Repeatability : Down to 150 nrad

Linearity : Down to 0.4 %

Vacuum Compatibility

Non Magnetic Version

Piezo Multi-Axis Stages

Displacement : Up to 1 mm in XY

Resolution : Down to 1 nm

Repeatability : Down to 6 nm

Linearity : Down to 0.1 %

Large Aperture

High Dynamics