PIEZO SYSTEMS

Piezo Stacks

Preloaded Actuators

Parallel Lever Actuators

Double Lever Actuators

X Axis Stages (SGS)

X Axis Stages (CAP)

X Axis Stages

XY Axis Stages (SGS)

XY Axis Stages (CAP)

Z Axis Stages (SGS)

Z Axis Stages (CAP)

Z Axis Stages (SGS)

XYZ Axis Stages (SGS)

XYZ Axis Stages (CAP)

XYR Axis Stages (CAP)

Objective Stages (SGS)

Objective Stages

Beam Steering (SGS)

Customized Solutions

MPO Piezo Stacks

Travel Range : 15 ~ 90 µm
Push/Pull Force : 1,500 / 50 N
Blocking Force : 1,125 N
Resonance, Unloaded : 105 ~ 24 kHz
Spherical End Pieces Option

Data Sheet

Manual

Video

HPO Actuators (Openloop)

Travel Range : 15 ~ 216 µm
Min. Incremental Motion : 0.1 ~ 1 nm
Pull/Push Force : 1,400 / 100 N
Resonance, Unloaded : 20 ~ 6 kHz
Spherical End Pieces Option

Data Sheet

Manual

Video

HPS Actuators

Travel Range : 50 ~ 150 µm
Min. Incremental Motion : 0.5 ~ 1.5 nm
Pull/Push Force : 1,400 / 100 N
Resonance, Unloaded : 12 ~ 6 kHz
Spherical End Pieces Option

Data Sheet

Manual

Video

PPS Lever Actuators

Travel Range : 100 ~ 1,000 µm
Min. Incremental Motion : 2 ~ 25 nm
Repeatability : 7 ~ 60 nm
Pull/Push Force : 50 ~ 30 / 15 ~ 20 N
HV / UHV Options

Data Sheet

Manual

Video

DPS Lever Actuators

Travel Range : 100 ~ 1,600 µm
Min. Incremental Motion : 2 ~ 25 nm
Repeatability : 7 ~ 60 nm
Pull/Push Force : 200 ~ 30 / 100 ~ 10 N
HV / UHV Options

Data Sheet

Manual

Video

C1S X Stages

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 1 ~ 6 nm
Repeatability : 10 ~ 50 nm
Load Capacity : 500 ~ 200 g
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

LPC X Stages

Travel Range : 45 ~ 90 µm
Min. Incremental Motion : 0.3 ~ 0.5 nm
Repeatability : 4 ~ 8 nm
Pull/Push Force : 200 / 25 N ~ 100 / 10 N
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

LPS/C X Stages

Travel Range : 100 ~ 1,000 µm
Min. Incremental Motion : 0.5 ~ 15 nm
Repeatability : 5 ~100 nm
Pull/Push Force : 30 ~ 50 / 10~20 N
HV / UHV Options

Data Sheet

Manual

Video

C2S XY Stages

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 1 ~ 6 nm
Repeatability : 10 ~ 50 nm
Load Capacity : 500 ~ 200 g
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

L2C XY Stages

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 0.5 ~ 3 nm
Repeatability : 5 ~ 30 nm
Linearity : 0.02 %
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

CPS Z Stages

Travel Range : 100 ~ 500 µm
Min. Incremental Motion : 1 ~ 5 nm
Repeatability : 10 ~ 50 nm
Pull/Push Force : 15 ~ 40 / 10 ~ 20 N
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

SPS Z Stages

Travel Range : 120 ~ 650 µm
Min. Incremental Motion : 1 ~ 4 nm
Repeatability : 10 ~ 30 nm
Pull/Push Force : 50 / 20 N ~ 40 / 15 N
HV / UHV Options

Data Sheet

Manual

Video

LPC Z Stage

Travel Range : 100 µm
Min. Incremental Motion : 0.8 nm
Repeatability : 5 nm
Load Capacity : 5 kg
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

LPS Z Stage

Travel Range : 300 µm
Min. Incremental Motion : 3 nm
Repeatability : 30 nm
Load Capacity : 5 kg
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

C3S XYZ Stages

Travel Range : 100 ~ 600 µm (500µm in Z)
Min. Incremental Motion : 1 ~ 6 nm
Repeatability : 10 ~ 50 nm
Load Capacity : 500 ~ 200 g
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

L3C XYZ Stages

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 0.5 ~ 3 nm
Repeatability : 5 ~ 30 nm
Linearity : 0.02 %
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

L2RC XYR Stages

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 0.5 ~ 3 nm
Repeatability : 5 ~ 30 nm
Linearity : 0.02 %
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

SFS DynamicFocus

Travel Range : 100 µm
Min. Incremental Motion : 1 nm
Repeatability : 10 nm
Pull/Push Force : 80 / 30 N
Resonance, with 200g : 1,100 Hz

Data Sheet

Manual

Video

SFS QuickFocus

Travel Range : 150 µm
Min. Incremental Motion : 2 nm
Repeatability : 15 nm
Pull/Push Force : 10 / 20 N
HV / UHV Options

Data Sheet

Manual

Video

SFS SlimFocus

Travel Range : 200 µm
Min. Incremental Motion : 2 nm
Repeatability : 20 nm
Pull/Push Force : 10 / 5 N
HV / UHV Options

Data Sheet

Manual

Video

SFS RangeFocus

Travel Range : 100 ~ 600 µm
Min. Incremental Motion : 1 ~ 6 nm
Repeatability : 10 ~ 50 nm
Pull/Push Force : 10 ~15 / 20 N
HV / UHV Options

Data Sheet

Manual

Video

SFS/C StraightFocus

Travel Range : 100 ~ 800 µm
Min. Incremental Motion : 1.5 ~ 12 nm
Repeatability : 10 ~ 80 nm
Pull/Push Force : 10 ~15 / 20 N
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

T2S Beam Steering Stages

Travel Range : 6 / 12 µrad
Min. Incremental Motion : 50 nrad
Repeatability : 250 nrad
Resonance, ø25 Mirror : 1.5 kHz
HV / UHV / Non Magnetic Options

Data Sheet

Manual

Video

Customized Solutions

Position Sensor : SGS & Capacitive
Travel Range : µm ~ mm
Flexible Up To 6 Degrees Of Freedom
Special Options : UHV & Non Magnetic
Special-Designed Piezo Drivers

Data Sheet

Manual

Video