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8 weeks leadtime for most products!
피에조시스템은 피에조와 정밀 센서가 결합되어 나노미터 급 분해능과 빠른 응답성을 가집니다. 이를 바탕으로 나노미터 급 정밀도가 요구되는 정밀 측정 시스템, 초고해상도 현미경, 반도체검사 장비 등에 적용가능합니다.
Piezo Actuators
Displacement : Up to 1.5 mm
Resolution : Down to 1.5 nm
Repeatability : Down to 6 nm
Linearity : Down to 0.1 %
Push/Pull Force : Up to 200/30 N
High Dynamics
Piezo Objective Scanner
Displacement : Up to 1 mm
Resolution : Down to 1 nm
Repeatability : Down to 10 nm
Linearity : Down to 0.2 %
Push/Pull Force : 20/15 N
Various Adapters
Piezo Tip/Tilt Platforms
Angle / Deflection Range : 6 / 12 mrad
Resolution : Down to 80 nrad
Repeatability : Down to 150 nrad
Linearity : Down to 0.4 %
Vacuum Compatibility
Non Magnetic Version
Piezo Multi-Axis Stages
Displacement : Up to 1 mm in XY
Large Aperture